Characterization of a miniature thermal shear-stress sensor with backside connections

Sensors and Actuators, A: Physical

Volumn 128, Issue 2, 2006, Pages 305-311

  Kim, In Cheol ^a   Lee, Sang Joon ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

Backside connection; Bulk micromachining; Frequency response; Shear stress sensor

Indexed keywords

CALIBRATION; FABRICATION; FREQUENCY RESPONSE; GOLD; MICROMACHINING; ROTATING DISKS; SHEAR STRESS;

BACKSIDE CONNECTION; BULK MICROMACHINING; SHEAR-STRESS SENSORS;

SENSORS;

EID: 33645978061     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.02.006     Document Type: Article

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