Monitoring the quality of ultra-pure water in the semiconductor industry by online ion chromatography

Microchimica Acta

Volumn 154, Issue 1-2, 2006, Pages 15-20

  Ehmann, Thomas ^a   Mantler, Claus ^b   Jensen, Detlef ^c   Neufang, Ralf ^c  

^a WACKER CHEMIE AG   (Germany)

^b SILTRONIC AG   (Germany)

^c Dionex GmbH   (Germany)

Author keywords

IC; Online ion chromatography; Semiconductor industry; Ultra pure water (UPW)

Indexed keywords

EID: 33645969878     PISSN: 00263672     EISSN: 14365073     Source Type: Journal    
DOI: 10.1007/s00604-005-0427-3     Document Type: Conference Paper

References (24)

1. International Technology Roadmap for Semiconductors, 2004 Update, Overall Roadmap Technology Characteristics. SEMATECH, Austin, TX
2. E J Ferrero D Posey 2002 J Anal At Spectrom 17 1194
3. P Rostham-Khani M J P Hopstaken P Vullings G Noij O O'Halloran W Claassen 2004 Appl Surf Sci 231-232 720
4. B A Kyereboah-Taylor 1995 Am Lab 27 12 24A
5. L E Vanatta 1996 J Chromatogr A 739 199
6. L E Vanatta D E Coleman 1997 J Chromatogr A 770 105
7. V D Nguyen H Neumeister G Subklew 1999 Fresenius J Anal Chem 363 783
8. T Ehmann L Fabry J Moreland J Hage M Serwe 2000 Semicond FABTECH 12 71
9. B Newton K H Somerville 2000 Ultrapure Water 17 6 52
10. B M De Borba M Laikhtman J S Rohrer 2003 J Chromatogr A 995 143
11. ASTM (1999) D5127-99: Standard guide for ultra pure water used in the electronics and semiconductor industry. ASTM International, West Conshohocken, PA, USA, pp 1-5
12. DIN Deutsches Institut für Normung e V (1994) DIN 32645: Chemical analysis; decision limit, detection limit and determination limit; estimation in cases of repeatability, terms, methods evaluation. Beuth Verlag, Berlin, pp 1-12
13. International Standard (1999) ISO 14644-1 Cleanrooms and associated controlled environments. Part 1: classification of air cleanliness. International Organization for Standardization, Genève, pp 1-24
14. I Molnar 2000 J Chromatogr A 965 175
15. DIN Deutsches Institut für Normung e V (1995) DIN EN ISO 10304-1: water quality - determination of dissolved fluoride, chloride, nitrite, orthophosphate, bromide, nitrate and sulfate ions, using liquid chromatography of ions - part 1: method for water with low contamination. Beuth Verlag, Berlin, pp 1-25
16. Product Manual IONPAC® AG17 Guard Column/IONPAC® AS17 Analytical column, document no. 031529 (2002). Dionex Corporation, Sunnyvale, CA, pp 1-35
17. Product Manual IONPAC® CG12 Guard Column/IONPAC® CS12 analytical column, document no. 034657 (2003). Dionex Corporation, Sunnyvale, CA, pp 1-35
18. J P Denoncourt Y Egozy 1986 Ultrapure Water 3 4 40
19. S S Heberling 1996 Ultrapure Water 13 9 62
20. R Kunin P Yarnell 1997 Ultrapure Water 14 8 58
21. J B Goodman 1994 UCT 6 142
22. J Goodman S Andrews 1990 Solid State Technol 13 65
23. DryLab User's Manual (2000). LCResources. Walnut Creeak, CA
24. T Brinkmann C H Specht F H Frimmel 2002 J Chromatogr A 957 99