Trends in the use of ion chromatography for monitoring high-purity water at semiconductor plants

Ultrapure Water

Volumn 17, Issue 6, 2000, Pages 52-54

  Newton, B ^a   Somerville, K H ^a  

^a MICRON TECHNOLOGY INC   (United States)

Author keywords

Chemical analysis; Chromatography; Ion; Semiconductor; Water

Indexed keywords

CHEMICAL ANALYSIS; CHROMATOGRAPHY; ION; SEMICONDUCTOR; WATER;

EID: 0033915650     PISSN: 07478291     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (7)