Latchable phase-change actuators for micro flow control applications

American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS

Volumn 7 MEMS, Issue , 2005, Pages 741-744

  Yang, Bozhi ^a   Lin, Qiao ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LAB-ON-A-CHIP SYSTEMS; MICROCHANNELS; PNEUMATIC PRESSURE;

DEFORMATION; ENERGY UTILIZATION; LITHOGRAPHY; MULTILAYERS; PARAFFIN WAXES; PHASE TRANSITIONS; VALVES (MECHANICAL);

ACTUATORS;

EID: 33645960992     PISSN: 1096665X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2005-81964     Document Type: Conference Paper

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