Characterization of thermally treated Mo/Si multilayer mirrors with standing wave-assisted EXAFS

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 246, Issue 1, 2006, Pages 127-130

  Rovezzi, M ^a,b   D'Acapito, F ^b   Patelli, A ^c   Rigato, V ^c   Salmaso, G ^c   Bontempi, E ^c   Davoli, I ^a  

^a UNIVERSITY OF ROME TOR VERGATA   (Italy)

^b EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

^c LABORATORI NAZIONALI DI LEGNARO   (Italy)

Author keywords

Multilayer mirrors; Standing wave; Surfaces and interfaces; Synchrotron radiation; X ray absorption spectroscopy

Indexed keywords

ABSORPTION; LITHOGRAPHY; MAGNETRON SPUTTERING; MOLYBDENUM COMPOUNDS; PERFORMANCE; RADIOFREQUENCY SPECTROSCOPY; REFLECTION; STANDING WAVE METERS; SUBSTRATES; SYNCHROTRON RADIATION; ULTRAVIOLET RADIATION; X RAY SPECTROSCOPY;

MULTILAYER MIRRORS; STANDING WAVE; SURFACES AND INTERFACES; X-RAY ABSORPTION SPECTROSCOPY;

MIRRORS;

EID: 33645907193     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.12.023     Document Type: Article

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