Bulk-micromachined optical filter based on guided-mode resonance in silicon-nitride membrane

Journal of Lightwave Technology

Volumn 24, Issue 4, 2006, Pages 1922-1928

  Hsu, Che Lung ^a   Liu, Yung Chih ^a   Wang, Chih Ming ^a   Wu, Mount Learn ^a   Tsai, Ya Lun ^a   Chou, Yue Hong ^a   Lee, Chien Chieh ^a   Chang, Jenq Yang ^a  

^a NATIONAL CENTRAL UNIVERSITY   (Taiwan)

Author keywords

Bulk micromachining; Guided mode resonance (GMR); SINx membrane

Indexed keywords

DIFFRACTION GRATINGS; MEMBRANES; MICROMACHINING; MICROPROCESSOR CHIPS; NOTCH FILTERS; OPTOELECTRONIC DEVICES; RESONANCE; SILICON NITRIDE;

BULK-MICROMACHINING; GUIDED-MODE RESONANCE (GMR); SILICON-NITRIDE MEMBRANE; WAVEGUIDE STRUCTURE;

OPTICAL FILTERS;

EID: 33645831780     PISSN: 07338724     EISSN: None     Source Type: Journal    
DOI: 10.1109/JLT.2006.871117     Document Type: Article

References (23)

1. C. Rossi, D. Estève, and C. Minguès, "Pyrotechnic actuator: A new generation of Si integrated actuator," Sens. Actuators A, Phys., vol. 74, no. 1-3, pp. 211-215, Apr. 1999.
2. x membrane for microheater applications," Sens. Actuators A, Phys., vol. 64, no. 3, pp. 241-245, Jan. 1998.
3. F. Mailly, A. Giani, A. Martinez, R. Bonnot, P. Temple-Boyer, and A. Boyer, "Micromachined thermal accelerometer," Sens. Actuators A, Phys., vol. 103, no. 3, pp. 359-363, Feb. 2003.
4. A. W. van Herwaarden, F. G. van Herwaarden, S. A. Molenaar, E. J. G. Goudena, M. Laros, P. M. Sarro, C. A. Schot, W. van der Vlist, L. Blarre, and J. P. Krebs, "Design and fabrication of infrared detector arrays for satellite attitude control," Sens. Actuators A, Phys., vol. 83, no. 1-3, pp. 101-108, May 2000.
5. F. Mailly, A. Giani, R. Bonnot, P. Temple-Boyer, F. Pascal-Delannoy, A. Foucaran, and A. Boyer, "Anemometer with hot platinum thin film," Sens. Actuators A, Phys., vol. 94, no. 1-2, pp. 32-38, Oct. 2001.
6. J. E. Ford, V. Aksyuk, D. J. Bishop, and J. A. Walker, "Wavelength add-drop switching using tilting micromirrors," J. Lightw. Technol., vol. 17, no. 5, pp. 904-911, May 1999.
7. T. R. Ohnstein, J. D. Zook, and H. B. French, "Tunable IR filters with integral electromagnetic actuators," in Proc. SPIE Solid-State Sensor and Actuator Workshop, 1996, pp. 196-199.
8. Z. S. Liu, S. Tibuleac, D. Shin, P. P. Young, and R. Magnusson, "High-efficiency guided-mode resonance filter," Opt. Lett., vol. 23, no. 19, pp. 1556-1558, Oct. 1998.
9. Z. Hegedus and R. Netterfield, "Low sideband guided-mode resonance filter," Appl. Opt., vol. 39, no. 10, pp. 1469-1473, Apr. 2000.
10. S. S. Wang and R. Magnusson, "Design of waveguide-grating filters with symmetrical line shapes and low sideband," Opt. Lett., vol. 19, no. 12, pp. 919-921, Jun. 1994.
11. A. Sharon, D. Rosenblatt, and A. A. Friesem, "Narrow spectral band-widths with grating waveguide structures," Appl. Phys. Lett., vol. 69, no. 27, pp. 4154-4156, Dec. 1996.
12. S. T. Thurman and G. M. Morris, "Controlling the spectral response in guided-mode resonance filter design," Appl. Opt., vol. 42, no. 16, pp. 3225-3233, Jun. 2003.
13. A. Sharon, D. Rosenblatt, A. A. Friesem, H. G. Webber, H. Engel, and R. Steingrueber, "Light modulation with resonant grating-waveguide structures," Opt. Lett., vol. 21, no. 19, pp. 1564-1566, Oct. 1996.
14. R. Magnusson, D. Shin, and Z. S. Liu, "Guided-mode resonance Brewster filter," Opt. Lett., vol. 23, no. 8, pp. 612-614, Apr. 1998.
15. D. L. Brundrett, E. N. Glytsis, and T. K. Gaylord, "Normal-incidence guided-mode resonant grating filters: Design and experimental demonstration," Opt. Lett., vol. 23, no. 9, pp. 700-702, May 1998.
16. R. J. Stockermans and P. L. Rochon, "Narrow-band resonant grating waveguide filters constructed with azobenzene polymers," Appl. Opt., vol. 38, no. 17, pp. 3714-3719, Jun. 1999.
17. R. Magnusson and S. S. Wang, "New principle for optical filters," Appl. Phys. Lett., vol. 61, no. 9, pp. 1022-1024, Aug. 1992.
18. Y. Nie, L. Wang, Z. Wang, and C. Lai, "Beam selector dependent on incident angle by guided-mode resonant subwavelength grating," Opt. Eng., vol. 41, no. 11, pp. 2966-2969, Nov. 2002.
19. Y. Ding and R. Magnusson, "Resonant leaky-mode spectral-band engineering and device applications," Opt. Express, vol. 12, no. 23, pp. 5661-5674, Nov. 2003.
20. S. Tibuleac and R. Magnusson, "Narrow-linewidth bandpass filter with diffractive thin-film layers," Opt. Lett., vol. 26, no. 9, pp. 584-586, May 2001.
21. D. K. Jacob, S. C. Dunn, and M. G. Moharam, "Flat-top narrow-band spectral response obtained from cascaded resonant grating reflection filters," Appl. Opt., vol. 41, no. 7, pp. 1241-1245, Mar. 2002.
22. D. Kim and K. Burke, "Design of a grating-based thin-film filter for broadband spectropolarimetry," Appl. Opt., vol. 42, no. 31, pp. 6321-6326, Nov. 2003.
23. D. L. Brundrett, E. N. Glytsis, and T. K. Gaylord, "Homogeneous layer models for high-spatial frequency dielectric surface relief gratings: Conical diffraction and antireflection designs," Appl. Opt., vol. 33, no. 13, pp. 2695-2706, May 1994.