A millimeter-wave bandpass waveguide filter using a width-stacked silicon bulk micromachining approach

IEEE Microwave and Wireless Components Letters

Volumn 16, Issue 4, 2006, Pages 209-211

  Stickel, Micah ^a,b   Kremer, Peter ^b   Eleftheriades, George V ^a,b  

^a IEEE   (Canada)

^b UNIVERSITY OF TORONTO   (Canada)

Author keywords

Anisotropic etching of silicon; Bulk micromachining; Micromachined cavity; Millimeter waves; Waveguide filter

Indexed keywords

ANISOTROPIC ETCHING OF SILICON; BULK MICROMACHINING; MICROMACHINED CAVITY; MILLIMETER-WAVES; WAVEGUIDE FILTERS;

ELECTRIC CONDUCTIVITY MEASUREMENT; ELECTRIC NETWORK TOPOLOGY; ETCHING; MICROMACHINING; OHMIC CONTACTS; SEMICONDUCTING SILICON; SILICON WAFERS; WAVEGUIDES;

WAVE FILTERS;

EID: 33645682410     PISSN: 15311309     EISSN: None     Source Type: Journal    
DOI: 10.1109/LMWC.2006.872116     Document Type: Article

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