A silicon micromachined four-pole linear phase filter

IEEE Transactions on Microwave Theory and Techniques

Volumn 52, Issue 6, 2004, Pages 1598-1607

  Harle, Lee ^a   Katehi, Linda P B ^b  

^a UNIVERSITY OF MICHIGAN   (United States)

^b PURDUE UNIVERSITY   (United States)

Author keywords

Evanescent waveguide; Linear phase shifter; Micromachined cavity; Microwave filter

Indexed keywords

BANDWIDTH; CAVITY RESONATORS; COMPUTER SIMULATION; MICROMACHINING; MICROSTRIP LINES; NONLINEAR FILTERING; PHASE SHIFTERS; SEMICONDUCTING SILICON; SIGNAL DISTORTION; TIME DOMAIN ANALYSIS;

CROSS COUPLING; EVANESCENT WAVEGUIDES; LINEAR PHASE SHIFTERS; MICROMACHINED CAVITIES;

MICROWAVE FILTERS;

EID: 2942513143     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMTT.2004.828456     Document Type: Article

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