High-Q silicon micromachined cavity resonators at 30 GHz using the split-block technique

IEE Proceedings: Microwaves, Antennas and Propagation

Volumn 151, Issue 5, 2004, Pages 450-454

  Stickel, M T ^a   Kremer, P C ^a   Eleftheriades, G V ^a  

^a UNIVERSITY OF TORONTO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; MICROMACHINING; SILICON WAFERS; WAVEGUIDE COMPONENTS;

MICROMACHINED CAVITIES; SPLIT BLOCK TECHNIQUE;

CAVITY RESONATORS;

EID: 10044247164     PISSN: 13502417     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1049/ip-map:20040898     Document Type: Article

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