High-Q bulk micromachined silicon cavity resonator at Ka-band

Electronics Letters

Volumn 37, Issue 7, 2001, Pages 433-435

  Stickel, M ^a   Eleftheriades, G V ^a   Kremer, P ^a  

^a UNIVERSITY OF TORONTO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; METALLIZING; MICROMACHINING; Q FACTOR MEASUREMENT; SILICON WAFERS; WAVEGUIDES;

BULK SILICON MICROMACHINING METHOD; DEEP THREE-DIMENSIONAL STACKED STRUCTURES; INNOVATIONS; POST WAFER-BONDING METALLIZATION;

CAVITY RESONATORS;

EID: 0035967019     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20010313     Document Type: Article

References (5)

1. Silicon micromachined waveguides for millimeter-wave and submillimeter-wave frequencies
2. A micromachined high-Q X-band resonator
3. Microwave and millimeter-wave high-Q micromachined resonators
4. Characterization of high-Q resonators for microwave-filter applications