Batch microfabrication of metal-embedded micro thin film sensors for applications in hostile environments

Electrochemical and Solid-State Letters

Volumn 8, Issue 11, 2005, Pages

  Datta, A ^a   Choi, H S ^a   Cheng, X ^a   Li, X ^a  

^a University of Wisconsin Madison   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC MATERIALS; ELECTROPLATING; FABRICATION; MULTILAYERS; NICKEL; STRAIN GAGES; THIN FILMS;

METALLIC STRUCTURES; MICROFABRICATION; MICROSTRAIN GAUGES; THIN FILM SENSORS;

SENSORS;

EID: 27744438500     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2041328     Document Type: Article

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