Microwave dielectric properties of CaTiO3 and MgTiO3 thin films

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 9 B, 2003, Pages 6158-6161

  Lee, Byoung Duk ^a   Yoon, Ki Hyun ^a   Kim, Eung Soo ^b   Kim, Tae Hong ^c  

^a Yonsei University   (South Korea)

^b Kyonggi University   (South Korea)

^c Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

Author keywords

CaTiO3; Dielectric constant; Dielectric loss; Film; MgTiO3; Microwave; Temperature coefficient of dielectric constant

Indexed keywords

ANNEALING; CALCIUM COMPOUNDS; CRYSTALLIZATION; DIELECTRIC LOSSES; DIELECTRIC PROPERTIES; GRAIN SIZE AND SHAPE; MAGNESIUM COMPOUNDS; MICROWAVES; PERMITTIVITY;

CALCIUM TITANATE; CRYSTALLINITY; MAGNESIUM TITANATE;

THIN FILMS;

EID: 0345603626     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.6158     Document Type: Article

References (17)

1. W. S. Kim, K. H. Yoon and E. S. Kim: J. Am. Ceram. Soc. 83 (2000) 2327.
2. H. S. Park, K. H. Yoon and E. S, Kim: J. Am. Ceram. Soc. 84 (2001) 99.
3. V. M. Ferreira and J. L. Baptista: J. Am. Ceram. Soc. 79 (1996) 1697.
4. V. M. Ferreira, F. Azough, R. Freer and J. L. Baptista: J. Mater. Res. 12 (1997) 3293.
5. K. Wakino: Ferroelectrics 91(1989) 69.
6. C. Huang and M. Weng: Mater. Res. Bull. 36 (2001) 2741.
7. Y. H. Choi and J. Lee: Thin Solid Films 385 (2001) 43.
8. P. C. Joshi and S. B. Desu: Appl. Phys. Lett. 73 (1998) 1080.
9. Z. Ma, A. J. Becker, P. Polakos, H. Huggins, J. Pastalan, H. Wu, K. Watts, Y. H. Wong and P. Mankiewich: IEEE Trans. Electron Devices 45 (1998) 1811.
10. Y. Kim, J. Oh, T. Kim and B. Park: Jpn. J. Appl. Phys. 40 (2001) 4599.
11. C. Huang and C. Pan: Jpn. J. Appl. Phys. 41 (2002) 707.
12. M. W. Cole, C. Hubbard, E. Ngo, M. Ervin, M. Wood and R. G. Geyer: J. Appl. Phys. 92 (2002) 475.
13. O. Nakagawara, Y. Toyota, M. Kobayashi, Y. Yoshino, Y. Katayama, H. Tabata and T. Kawai: J. Appl. Phys. 80 (1996) 388.
14. J. Sohn, Y. Inaguma, S. Yoon, M. Itoh, T. Nakamura, S. Yoon and H. Khim: Jpn. J. Appl. Phys. 33 (1994) 5466.
15. P. Jammy and L. A. Wiils: Integr. Ferroelectr. 15 (1997) 235.
16. R. Freer: Br. Ceram. Soc. Proc. 55 (1995) 171.
17. D. Dube, J. Baborowski, P. Muralt and N. Setter: Appl. Phys. Lett. 74 (1999) 3546.