SCOPUS 정보 검색 플랫폼

Volumn 74, Issue , 2005, Pages 113-122

Electrical characterization of zirconium oxide layers grown by liquid delivery MOCVD

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PERMITTIVITY; SUBSTRATES; SURFACE ROUGHNESS; X RAY DIFFRACTION;

DEPOSITION TEMPERATURE; LIQUID DELIVERY; SILICON SUBSTRATES; ZIRCONIUM OXIDE LAYERS;

ZIRCONIUM COMPOUNDS;

EID: 33645532979 PISSN: 10584587 EISSN: 16078489 Source Type: Conference Proceeding
DOI: 10.1080/10584580500414010 Document Type: Conference Paper

Times cited : (1)

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