MEMS-based force sensor: Design and applications

Bell System Technical Journal

Volumn 10, Issue 3, 2005, Pages 61-80

  López, Daniel ^a,b,c   Decca, Ricardo S ^b,d   Fischbach, Ephraim ^c,e   Krause, Dennis E ^f  

^a LUCENT TECHNOLOGIES   (United States)

^b New Jersey Nanotechnology Consortium ^*

^c AMERICAN PHYSICAL SOCIETY   (United States)

^d INDIANA UNIVERSITY   (United States)

^e PURDUE UNIVERSITY   (United States)

^f WABASH COLLEGE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FORCE SENSORS; MICROMACHINED FORCE DETECTORS; MICROMACHINED TORSIONAL OSCILLATORS; QUANTUM VACUUM FLUCTUATION FORCES;

ARCHITECTURAL DESIGN; FORCE MEASUREMENT; GRAVITATIONAL EFFECTS; INTERFEROMETRY; MICROELECTROMECHANICAL DEVICES; OSCILLATORS (ELECTRONIC); SENSITIVITY ANALYSIS;

MICROSENSORS;

EID: 33645508904     PISSN: 00058580     EISSN: 15387305     Source Type: Journal    
DOI: 10.1002/bltj.20104     Document Type: Review

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