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Volumn 27, Issue 1, 1999, Pages 63-69

Depth profiling of thin surface layers using the amplitude modulation method in radiofrequency-powered glow discharge optical emission spectrometry

(1) Wagatsuma, Kazuaki a

a TOHOKU UNIVERSITY (Japan)

Author keywords

Amplitude modulation method; Depth profiling; GDOES; r.f. glow discharge

Indexed keywords

AMPLITUDE MODULATION; ELECTROPLATING; EMISSION SPECTROSCOPY; GLOW DISCHARGES; NICKEL; SIGNAL TO NOISE RATIO; SPUTTER DEPOSITION; SURFACE PROPERTIES; THIN FILMS;

DEPTH PROFILING; GLOW DISCHARGE OPTICAL EMISSION SPECTROMETRY (GDOES);

METALLIC FILMS;

EID: 0032795119 PISSN: 01422421 EISSN: None Source Type: Journal
DOI: 10.1002/(sici)1096-9918(199901)27:1<63::aid-sia465>3.0.co;2-r Document Type: Article

Times cited : (10)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.