Optical properties of SrTiO3 thin films deposited by radio-frequency magnetron sputtering at various substrate temperatures

Journal of Applied Physics

Volumn 99, Issue 3, 2006, Pages

  Ma, J H ^a   Huang, Z M ^a   Meng, X J ^a   Liu, S J ^a   Zhang, X D ^a   Sun, J L ^a   Xue, J Q ^a   Chu, J H ^a   Li, J ^b  

^a SHANGHAI INSTITUTE OF TECHNICAL PHYSICS   (China)

^b SHANXI UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

MAGNETRON SPUTTERING; OSCILLATORS (ELECTRONIC); SILICA; SPUTTER DEPOSITION; STRONTIUM COMPOUNDS; SUBSTRATES;

BAND GAPS; FILM THICKNESS; TRANSMITTANCE MEASUREMENTS;

THIN FILMS;

EID: 33645498919     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2168029     Document Type: Article

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