Phase formation by ion beam mixing in the Ti/Si multilayer system

Applied Surface Science

Volumn 252, Issue 11, 2006, Pages 4016-4019

  Sisodia, Veenu ^a   Kabiraj, D ^b   Bolse, W ^c   Jain, I P ^a  

^a UNIVERSITY OF RAJASTHAN   (India)

^b INTER UNIVERSITY ACCELERATOR CENTRE   (India)

^c UNIVERSITY OF STUTTGART   (Germany)

Author keywords

Ion beam mixing; Irradiation; Swift heavy ion

Indexed keywords

HEAVY IONS; IRRADIATION; MULTILAYERS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON COMPOUNDS; TITANIUM COMPOUNDS; X RAY DIFFRACTION;

GRAZING INCIDENCE; ION BEAM MIXING; PHASE FORMATION; SWIFT HEAVY ION;

MIXING;

EID: 33645326196     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2005.09.035     Document Type: Conference Paper

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