Time-average interference microscopy for vibration testing of silicon microelements

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 6158, Issue , 2006, Pages

  Patorski, Krzysztof ^a   Styk, Adam ^a   Sienicki, Zbigniew ^a  

^a WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

MEMS MOEMS; Optical methods of testing; Time averaged interferometry; Vibration studies

Indexed keywords

ACTUATORS; MICROSCOPIC EXAMINATION; OPTICAL SYSTEMS; SENSORS; SILICON; VIBRATION CONTROL;

MEMS/MOEMS; OPTICAL METHODS OF TESTING; TIME AVERAGED INTERFEROMETRY; VIBRATION STUDIES;

SIGNAL INTERFERENCE;

EID: 33645240498     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.675761     Document Type: Conference Paper

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