Simplified time-averaged digital interferometry for vibration studies of microelements

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4933, Issue , 2003, Pages 90-95

  Patorski, Krzysztof ^a   Józwicka, Agata ^a   Kalinowski, Artur ^a   Pawłowski, Michał ^a  

^a WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

MEMS MOEMS; Optical method of testing; Time averaged interferometry; Vibration studies

Indexed keywords

ELASTIC MODULI; MICROELECTROMECHANICAL DEVICES; SPECKLE;

DIGITAL INTERFEROMETRY;

INTERFEROMETRY;

EID: 0242552735     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.516582     Document Type: Conference Paper

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