Negative pulsed voltage discharge and DLC preparation in PBIID system

Thin Solid Films

Volumn 506-507, Issue , 2006, Pages 68-72

  Kirinuki, Michiharu ^a   Onoi, Masahiro ^a,b   Nishikawa, Keiichi ^a   Oka, Yoshihiro ^a   Azuma, Kingo ^a   Fujiwara, Etsuo ^a   Yatsuzuka, Mitsuyasu ^a  

^a UNIVERSITY OF HYOGO   (Japan)

^b Hyogo Science and Technology Association   (Japan)

Author keywords

Deposition rate; DLC; Negative pulsed voltage discharge; PBIID; Spectrum

Indexed keywords

DEPOSITION; HYDROCARBONS; ION IMPLANTATION; PLASMAS; SPECTRUM ANALYSIS; VOLTAGE DISTRIBUTION MEASUREMENT;

DEPOSITION RATE; DLC; NEGATIVE PULSED VOLTAGE DISCHARGE; PLASMA-BASED ION IMPLANTATION AND DEPOSITION (PBIID);

DIAMOND LIKE CARBON FILMS;

EID: 33645232254     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.08.076     Document Type: Conference Paper

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