Study of titanium-carbon gradient layers grown by combination of laser deposition and magnetron sputtering

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4915, Issue , 2002, Pages 305-310

  Jelínek, Miroslav ^a   Kadlec, Jaromír ^b   Kocourek, Tomáš ^a   Boháč, Petr ^a  

^a INSTITUTE OF PHYSICS   (Czech Republic)

^b MILITARY ACADEMY   (Czech Republic)

Author keywords

Hybrid system; Magnetron sputtering; Pulsed laser deposition; Titanium carbon

Indexed keywords

ADHESION; FILM GROWTH; MAGNETRON SPUTTERING; MICROHARDNESS; PULSED LASER DEPOSITION; SUBSTRATES;

HYBRID SYSTEM; TITANIUM CARBON GRADIENT LAYERS;

TITANIUM COMPOUNDS;

EID: 18744382732     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.482904     Document Type: Conference Paper

References (5)

1. M. Jelínek, J. Lančok, J. Bulíř, M. Novotný, Laser Physics 12, pp. 306-309, 3002.
2. Xinhua Zhu, Jianmin Zhu, Shunhua Zhou, Qi Li, Zhiguo Liu, Naiben Ming, Zhongyan Meng, Helen Lai-Wan Chan, Chung-Loong Choy, AFM-3 conference, Hong Kong, China, paper No. A4D-3, 2000.
3. A.A. Voevodin, J.S. Zabinski, Diamond and Related Materials, pp. 463-467, 1998.
4. M. Jelínek, T. Kocourek, Ja romír Ka dlec, Jiří Bulíř, 11th Annual International Laser physics Workshop 2002 - LPHYS 02, Slovakia, Laser Physic in print, 2002.
5. M. Jelínek, T. Kocourek, J. Kadlec, V. Vorlíček, V. Studnička, 12th International Conference on Thin Films ICTF 12, Slovakia, Thin Solid Films in print, 2002