Nanocontact printing of non-planar substrate by using flexible h-PDMS stamp

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6037, Issue , 2006, Pages

  Jo, Jeongdai ^a   Kim, Kwang Young ^a   Lee, Eung Sug ^a   Choi, Byung Oh ^a  

^a Korea Institute of Machine and Materials   (South Korea)

Author keywords

h PDMS stamp; Nanocontact printing; Non planar contact printing; s PDMS stamp; SAM; Softlithography

Indexed keywords

LITHOGRAPHY; MASKS; NANOSTRUCTURED MATERIALS; OPTICAL RESOLVING POWER;

H-PDMS STAMP; NANOCONTACT PRINTING; NON-PLANAR CONTACT PRINTING; S-PDMS STAMP; SOFT LITHOGRAPHY;

PRINTING;

LITHOGRAPHY; MASKING; PRINTING; RESOLUTION;

EID: 33645222593     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.638436     Document Type: Conference Paper

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