Deformation and failure of a film/substrate system subjected to spherical indentation: Part II. Prediction of failure modes in a thin TiN film deposited on a compliant elastic substrate

Journal of Materials Research

Volumn 21, Issue 3, 2006, Pages 783-790

  Math, S ^a   Jayaram, V ^a   Biswas, S K ^a  

^a INDIAN INSTITUTE OF SCIENCE   (India)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY CONDITIONS; DEFORMATION; DEPOSITION; FAILURE (MECHANICAL); HARDNESS; INDENTATION; MATHEMATICAL TRANSFORMATIONS; MULTILAYERS; STRESSES; SUBSTRATES; THIN FILMS;

ELASTIC SUBSTRATE; FAILURE MODES; FILM/SUBSTRATE SYSTEM; SPHERICAL INDENTATION;

TITANIUM NITRIDE;

EID: 33645107933     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2006.0095     Document Type: Article

References (15)

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