A numerical fracture analysis of indentation into thin hard films on soft substrates

Engineering Fracture Mechanics

Volumn 70, Issue 10, 2003, Pages 1323-1338

  Sriram, K ^a   Narasimhan, R ^a   Biswas, S K ^a  

^a INDIAN INSTITUTE OF SCIENCE   (India)

Author keywords

Energy release rate; Finite elements; Fracture; Indentation; Thin hard films

Indexed keywords

CRACK PROPAGATION; FINITE ELEMENT METHOD; INDENTATION; THIN FILMS;

FRACTURE ENERGY;

FRACTURE MECHANICS;

FRACTURE MECHANICS;

FRACTURE MECHANICS;

EID: 0037411099     PISSN: 00137944     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0013-7944(02)00112-1     Document Type: Article

References (18)

1. Shiwa M, Weppelman ER, Bendeli A, Swain MV, Munz D, Kishi T. Acoustic emission and precision force-displacement observation of spherical nanoindentation into TiN films on silicon. Surf Coat Technol 1994;68/69:598-602.
2. Haanappel VA, Vendel DV, Metselaar HS, Van Corbach HD, Fransen T, Gellings PJ. The mechanical properties of thin alumina films deposited by metal-organic chemical vapour deposition. Thin Solid Films 1995;254:153-65.
3. Weppelmann E, Swain MV. Investigation of stresses and stress intensity factors responsible for fracture of thin protective coatings during ultra-micro indentation tests with spherical indenters. Thin Solid Films 1996;286:111-21.
4. Kuper A, Clissold R, Martin PJ, Swain MV. A comparative assessment of three approaches for ranking the adhesion of TiN coatings onto two steels. Thin Solid Films 1997;308:329-33.
5. Wei Y, Hutchinson JW. Interface strength, work of adhesion and plasticity in the peel test. Int J Fract 1998;93:315-33.
6. Volinsky AA, Moody NR, Gerberich WW. Interfacial toughness measurements for thin films on substrates. Acta Mater 2002;50:441-66.
7. Pharr GM, Oliver WC. Measurement of thin film mechanical properties using nanoindentation. MRS Bull 1992;28-33.
8. Marshall DB, Lawn BR. Indentation of brittle materials. Microindentation Techniques in Materials Science and Engineering 1984.
9. Whitehead AJ, Page TF. Nanoindentation studies of thin film coated systems. Thin Solid Films 1992;220:277-83.
10. Hainsworth SV, McGurk MR, Page TF. The effect of coating cracking on the indentation response of thin hard-coated systems. Surf Coat Technol 1998;102:97-107.
11. Ding J, Meng Y, Wen S. Mechanical properties and fracture toughness of multilayer hard coatings using nanoindentation. Thin Solid Films 2000;371:178-82.
12. Karimi A, Shojaei OR, Kruml T, Martin JL. Characterization of TiN thin films using the bulge test and nanoindentation technique. Thin Solid Films 1997;308/309:334-39.
13. Tadmor EB, Miller R, Phillips R, Ortiz M. Nanoindentation and incipient plasticity. J Mater Res 1999;14:2233-50.
14. Nakamura T, Shih CF, Freund LB. Analysis of a dynamically loaded three-point bend ductile fracture specimen. Eng Fract Mech 1986;25:333-39.
15. Belytshko T, Liu WK, Moran B. Nonlinear finite elements for continua and structures. New York: Wiley 2000.
16. Wriggers P, Vu Wan T, Stein E. Finite element formulation for large deformation impact-contact problems with friction. Comput Struct 1990;37:319-31.
17. Johnson KL. Contact mechanics. Cambridge: Cambridge University Press; 1985.
18. Anderson TL. Fracture mechanics: fundamentals and applications. London: CRC Press; 1985.