Development of pNH 4-isfets microsensors for water analysis

Microelectronics Journal

Volumn 37, Issue 6, 2006, Pages 475-479

  Humenyuk, I ^a   Torbiero B ^a   Assie Souleille S ^a   Colin, R ^a   Dollat, X ^a   Franc, B ^a   Martinez, A ^a,b   Temple Boyer, P ^a  

^a LAAS CNRS   (France)

^b INSA   (France)

Author keywords

ChemFET sensor; pNH 4; Water analysis

Indexed keywords

AMMONIUM-SENSITIVE MEMBRANE; CHEMICAL FIELD EFFECT TRANSISTOR (CHEMFET); PHOTOSENSITIVE POLYSILOXANE (PSX);

ENVIRONMENTAL IMPACT; MICROSENSORS; PHOTOLITHOGRAPHY; POLLUTION; POLYMERS; SILICON COMPOUNDS;

AMMONIA;

EID: 33645051975     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2005.09.024     Document Type: Article

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