Study of front-side connected chemical field effect transistor for water analysis

Microelectronics Reliability

Volumn 44, Issue 3, 2004, Pages 443-447

  Temple Boyer, Pierre ^a   Launay, J ^a   Humenyuk, I ^a   Do Conto, T ^a   Martinez, A ^a   Beriet C ^b   Grisel, A ^b  

^a LAAS CNRS   (France)

^b Microsens SA   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC INSULATION; ELECTROLYTES; GATES (TRANSISTOR); ION SELECTIVE MEMBRANES; MICROELECTRONICS; MICROSENSORS; PHOTOLITHOGRAPHY; POLYMERIC MEMBRANES; POLYVINYL CHLORIDES; THRESHOLD VOLTAGE; WATER ANALYSIS;

BACK-SIDE CONNECTED (BSC); ENVIRONMENTAL POLLUTION; FRONT-SIDE CONNECTED (FSC);

ION SENSITIVE FIELD EFFECT TRANSISTORS;

EID: 1142263933     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.microrel.2003.10.001     Document Type: Article

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