Structure, electrical and optical properties of N-In codoped ZnO thin films prepared by ion-beam enhanced deposition method

Journal of Crystal Growth

Volumn 290, Issue 1, 2006, Pages 156-160

  Yuan, Ningyi ^a   Li, Jinhua ^a   Fan, Lining ^a   Wang, Xiuqin ^a   Zhou, Yi ^a  

^a CHANGZHOU UNIVERSITY   (China)

Author keywords

A1. Ion beam enhanced deposition; A3. Thin film; B1. N In codoped Zno

Indexed keywords

DEPOSITION; ELECTRIC PROPERTIES; GLASS; ION BEAMS; NITROGEN; OPTICAL PROPERTIES; THIN FILMS;

ANNEALING TEMPERATURE; GLASS SUBSTRATES; ION-BEAM ENHANCED DEPOSITION; N-IN CODOPED ZNO;

ZINC OXIDE;

EID: 33645024289     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2006.01.004     Document Type: Article

References (16)

1. Y.F. Chen, N.T. Tuan, Y. Segawa, H.J. Ko, S.K. Hong, and T. Yao Appl. Phys. Lett. 78 2001 1469
2. Z.K. Tang, G.K.L. Wang, P. Yu, M. Kawasaki, and A. Ohtomo Appl. Phys. Lett. 72 1998 3270
3. K. Ramamoorthy, M. Jayachandran, K. Sankaranarayanan, and P. Misra Curr. Appl. Phys. 4 2004 679
4. B.J. Jin, S. Im, and S.Y. Lee Thin Solid Films 366 2000 107
5. Y.R. Ryu, S. Zhu, J.D. Budai, H.R. Chandrasekhar, P.F. Miceli, and H.W. White J. Appl. Phys. 88 2000 201
6. S.Y. Lee, E.S. Shim, and H.S. Kand Thin Solid Films 473 2005 31
7. K.K. Kim, J.H. Song, H.J. Jung, W.K. Choi, S.J. Park, and J.H. Song J. Appl. Phys. 87 2000 3573
8. D.-K. Hwang, K.-H. Bang, M.-C. Jeong, and J.-M. Myoung J. Crystal Growth 254 2003 449
9. Kh.A. Abdullin, A.B. Aimagambetov, and N.B. Beisenkhanov Mater. Sci. Eng. B 109 2004 241
10. Z.-Z. Ye, J.-G. Lu, and H.-H. Chen J. Crystal Growth 253 2003 258
11. W. Xu, Z. Ye, T. Zhou, B. Zhao, L. Zhu, and J. Huang J. Crystal Growth 265 2004 133
12. W.M. Yim, and R.J. Paff J. Appl. Phys. 45 1974 1456
13. S. Ono, K. Wasa, and S. Hayakawa Wave Electron 3 1977 35
14. J.F. Moulder, N.F. Stickle, P.E. Sobol, K.D. Bomben, in: J. Chastain, R.C. King (Eds.), Handbook of X-ray Photoelectron Spectroscopy, PHI, 1995
15. B.J. Zhao, H.J. Yang, G.T. Du, and G.Q. Miao J. Crystal Growth 258 2003 130
16. M. Chen, X. Wang, Y.H. Yu, Z.L. Pei, X.D. Bai, C. Sun, R.F. Huang, and L.S. Wen Appl. Surf. Sci. 158 2000 134