Nonthermal atomospheric pressure jet for surface modification

Proceedings, Annual Technical Conference - Society of Vacuum Coaters

Volumn , Issue , 2005, Pages 208-213

  Weltmann, K D ^a   Ehlbeck, J ^a   Foest, R ^a   Stieber, M ^a  

^a Institute for Low Temperature Plasma Physics   (Germany)

Author keywords

Plasma cleaning and plasma activation; Plasma Enhanced CVD; Plasma source; Protective Coatings

Indexed keywords

ARGON; CHEMICAL VAPOR DEPOSITION; ELECTRODES; NITROGEN; PROTECTIVE COATINGS;

ATOMOSPHERIC PRESSURE JET; PLASMA ACTIVATION; PLASMA CLEANING AND PLASMA ACTIVATION;

PLASMA DEVICES;

EID: 33644973303     PISSN: 07375921     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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