Rotating cylindrical ITO targets for large area coating

Proceedings, Annual Technical Conference - Society of Vacuum Coaters

Volumn , Issue , 2005, Pages 111-115

  De Bosscher, W ^a   Delrue, H ^a   Van Holsbeke, J ^a   Matthews, S ^a   Blondeel, A ^a  

^a Bekaert sa   (Belgium)

Author keywords

ITO; Reactive deposition; Sputter deposition; Sputtering targets

Indexed keywords

COATINGS; ELECTROLUMINESCENCE; FLAT PANEL DISPLAYS; MAGNETRON SPUTTERING; PHOTOVOLTAIC CELLS; THIN FILMS;

ITO; REACTIVE DEPOSITION; SPUTTERING TARGETS; TOUCH PANELS;

INDIUM COMPOUNDS;

EID: 33644970385     PISSN: 07375921     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. C.G. Granquest, A. Hutåker, "Transparent and conducting ITO films: new developments and applications", Thin Solid Films, p. 411, 1, 2002.
2. D.S. Ginley, C. Bright, "Transparent Conduction Oxides", MRS Bull. 25 (8), 15, 2000.
3. K.P. Gibbons, C.K. Carnigila, R.E. Laird, "Sputtering of ITO from a rotating ceramic target", 41st Annual Technical Conference Proceedings of the Society of Vacuum Coaters, p. 159, 1998.
4. K. Suzuki, "State of the art in large area vacuum coatings on glass," Thin Solid Films, p. 351, 8, 1999.
5. A. Blondeel, R. Van Nuffel, W. De Bosscher, K. Dellaert, R. Broché. N. Founeau, "Large area rotating cylindrical magnetron sputtering: magnet system enhancements", 48th Annual Technical Conference Proceedings of the Society of Vacuum Coaters, p. TBD, 2005.