Sputtering of ITO from a rotating ceramic target

Proceedings, Annual Technical Conference - Society of Vacuum Coaters

Volumn , Issue , 1998, Pages 159-164

  Gibbons, K P ^a   Carniglia, C K ^a   Laird, R E ^a  

^a BOC Coating Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONDUCTIVE FILMS; COOLING; INDIUM COMPOUNDS; MAGNETRON SPUTTERING; SPUTTER DEPOSITION;

INDIUM TIN OXIDE;

CERAMIC COATINGS;

EID: 0031635922     PISSN: 07375921     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (1)