Calibration of three-dimensional integrated sensors for improved system accuracy

Sensors and Actuators, A: Physical

Volumn 127, Issue 2, 2006, Pages 340-344

  Zhu, Rong ^a   Zhou, Zhaoying ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Alignment error; Error compensation; Optical alignment; Three dimensional integrated sensor system

Indexed keywords

ALIGNMENT; CALIBRATION; DETECTORS; ERROR COMPENSATION; LEAST SQUARES APPROXIMATIONS; SYSTEMS ANALYSIS;

MISALIGNMENT ERRORS; OPTICAL ALIGNMENT; ORTHOGONAL OPTICAL ALIGNMENTS; SENSITIVE AXES; THREE-DIMENSIONAL INTEGRATED SYSTEM;

SENSORS;

EID: 33644924351     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.12.001     Document Type: Article

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