CMOS and MEMS process investigation

Biennial University/Government/Industry Microelectronics Symposium - Proceedings

Volumn , Issue , 1999, Pages 161-164

  Whipple, Tony ^a   Cibuzar, Greg ^a  

^a UNIVERSITY OF MINNESOTA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; MICROELECTRONICS; SUBSTRATES;

MOORE LAW;

MICROELECTROMECHANICAL DEVICES;

EID: 0032645460     PISSN: 07496877     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (7)