Patterning of fine particles by means of supercritical CO2

Journal of Materials Science

Volumn 41, Issue 5, 2006, Pages 1605-1610

  Huang, J ^a   Moriyoshi, T ^a   Manabe, H ^b  

^a Research Institute for Solvothermal Technology   (Japan)

^b Shikoku Instrumentation Co Ltd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DISPERSIONS; LITHOGRAPHY; MICROSTRUCTURE; PARTICLES (PARTICULATE MATTER); SURFACE REACTIONS;

FINE PARTICLES; SOLID SUBSTRATES; SUPERCRITICAL CO2-ASSISTED PRINTING (SCAP);

CARBON DIOXIDE;

EID: 33644917190     PISSN: 00222461     EISSN: 15734803     Source Type: Journal    
DOI: 10.1007/s10853-006-4655-7     Document Type: Article

References (19)

1. J. KLOESER, K. HEINRICHT, E. JUNG et al. Microelectronics Reliability, 40 (2000) 497.
2. D. J. HAYES, D. B. WALLACE and W. R. COX, J. Electronics Manufacturing, 8 (1998) 209.
3. H. M. NUR, J. H. SONG, J. R. G. EVANS and M. J. EDIRISINGHE, J. Mater. Sci. Mater. Electro., 13 (2002) 213.
4. Q. LIU and M. ORME, J. Mater. Proc. Tech., 115 (2001) 271.
5. M. DATTA and D. LANDOLT, Electrochimica Acta, 45 (2000) 2535.
6. A. P. ALKHIMOV et al., US Patent 5302414, 1994.
7. A. O. TOKAREV, Met. Sci. Heat. Treat. 35 (1996) 136.
8. C. V. BISHOP and G. W. LOAR, Plat. Surf. Finish 80 (1993) 37.
9. J. AKEDO, M. ICHIKI, K. KIKUCHI and R. MAEDA, Sensors and Acuators A: Physical, 69 (1998) 106.
10. D. W. MATSON, R. C. PETERSEN and R. D. SMITH, J. Mater. Sci., 22 (1987) 1919.
11. H. WAKAYAMA and Y. FUKUSHIMA, Chem. Commun., Issue 4 (1999) 391.
12. A. FENGHOUR and W. A. WAKEHAM, J. Phys. Chem. data, 27 (1998) 43.
13. M. GRUJICIC et al., Appl. Surf. Sci., 219 (2003) 211.
14. S. RANE, V. PURI and D. AMALNERKAR, J. Mater. Sci. Mater. Electro., 11 (2000) 667.
15. M. PRUDENZIATI, F. ZANARDI, B. MORTEN and A. F. GUALTIERI, J. Mater. Sci. Mater. Electro., 13 (2002) 31.
16. K. PARK and D. Y. BANG, J. Mater. Sci. Mater. Electro., 14 (2003) 81.
17. S. BURNSIDE, S. WINKEL, K. BROOKS etc., J. Mater. Sci. Mater. Electro., 11 (2000) 55.
18. S. SCHWARZER, B. PAWLOWSKI, A. RAHMIG and J. TOPFER, J. Mater. Sci. Mater. Electro., 15 (2004) 165.
19. N. J. DAYAN, R. N. KAREKAR, R. C. AIYER and S. R. SAINKAR, J. Mater. Sci. Mater. Electro., 8 (1997) 277.