Mechanical dissipation at elevated temperatures in tetrahedral amorphous carbon oscillators

Diamond and Related Materials

Volumn 15, Issue 2-3, 2006, Pages 309-312

  Czaplewski, D A ^a   Sullivan, J P ^a   Friedmann, T A ^a   Wendt, J R ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Defects; Diamond film; Micro electromechanical systems (MEMS); Thermal properties

Indexed keywords

ACTIVATION ENERGY; AMORPHOUS MATERIALS; RESONATORS;

DEFECT ACTIVATION ENERGIES; MECHANICAL DISSIPATION; TORSIONAL RESONATORS;

CARBON;

EID: 33644916674     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2005.07.027     Document Type: Conference Paper

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