Dielectric properties of amorphous carbon nitride films

Materials Research Society Symposium - Proceedings

Volumn 593, Issue , 2000, Pages 493-498

  Aono, M ^a   Katsuno, T ^a   Nitta, S ^a   Itoh, T ^a   Nonomura, S ^a  

^a GIFU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON INORGANIC COMPOUNDS; CHEMICAL BONDS; ETCHING; FILM PREPARATION; HYDROGEN; PERMITTIVITY; REFRACTIVE INDEX; SPUTTER DEPOSITION;

AMORPHOUS CARBON NITRIDE FILMS; ATOMIC HYDROGEN; CYCLIC PROCESS; DIAMOND LIKE CARBON;

AMORPHOUS FILMS;

EID: 0033683887     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

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