Guided-mode resonant grating filter fabricated on silicon-on-insulator substrate

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 45, Issue 3 A, 2006, Pages 1883-1885

  Kanamori, Yoshiaki ^a   Kitani, Takashi ^a   Hane, Kazuhiro ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Electron beam lithography; Guided mode resonant grating filter; Micromachining; Rigorous coupled wave analysis; Silicon on insulator; Subwavelength grating

Indexed keywords

DIFFRACTION GRATINGS; ELECTRON BEAM LITHOGRAPHY; ETCHING; MICROMACHINING; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; SPECTRUM ANALYSIS;

GUIDED-MODE RESONANT GRATING FILTERS; RIGOROUS COUPLED-WAVE ANALYSIS; SILICON-ON-INSULATORS; SUBWAVELENGTH GRATINGS;

OPTICAL FILTERS;

EID: 33644882536     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.45.1883     Document Type: Article

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