Fabricating subwavelength array structures using a near-field photolithographic method

Applied Physics Letters

Volumn 88, Issue 10, 2006, Pages

  Chang, Wei Lun ^a   Chang, Yu Jen ^a   Wei, Pei Kuen ^a   Tsao, Pei Hsi ^b  

^a RESEARCH CENTER FOR APPLIED SCIENCES   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; FINITE DIFFERENCE METHOD; LASER BEAMS; MASKS; PHOTORESISTS; TIME DOMAIN ANALYSIS;

FOCUSED BEAM; PHOTOMASK; SQUARE ROD ARRAYS; SUBWAVELENGTH ARRAY STRUCTURES;

PHOTOLITHOGRAPHY;

EID: 33644881927     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2185249     Document Type: Article

References (11)

1. J. D. Joannopoulos, R. D. Meade, and S. N. Winn, Photonic Crystals: Molding the Flow of Light (Princeton, United Kingdom, 1995).
2. S. Noda, K. Tomoda, N. Yamamoto, and A. Chutinan, Science 289, 604 (2000).
3. V. Berger, O. Gauthier-Lafaye, and E. Costard, Electron. Lett. 33, 425 (1997).
4. M. Campell, D. N. Sharp, M. T. Harrison, R. G. Denning, and A. J. Turberfield, Nature (London) 404, 53 (2000).
5. X. Luo and T. Ishihara, Opt. Express 12, 3055 (2004).
6. J. A. Rogers, K. E. Paul, R. J. Jackman, and G. M. Whitesidesa, Appl. Phys. Lett. 70, 2658 (1997).
7. T. W. Odom, J. C. Love, D. B. Wolfe, K. E. Paul, and G. M. Whitesides, Langmuir 18, 5314 (2002).
8. P. K. Wei, Y. C. Chen, and H. L. Chou, J. Opt. Soc. Am. B 20, 503 (2003).
9. P. K. Wei, H. L. Chou, and Y. C. Chen, Opt. Lett. 29, 433 (2004).
10. Taflove and S. C. Hagness, Computational Electrodynamics: The Finite-Difference Time-Domain Method (Artech House, Boston, 2000).
11. S. Jeon, J. U. Park, R. Cirelli, S. Yang, C. E. Heitzman, P. V. Braun, P. J. A. Kenis, and J. A. Rogers, PNAS 101, 12428 (2004).