The effect of Cu interlayers on grain size and stress in sputtered Fe-Cu multilayered thin films

Scripta Materialia

Volumn 54, Issue 10, 2006, Pages 1727-1732

  Shamsutdinov, N R ^a   Bottger A J ^a   Tichelaar, F D ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Internal stresses; Multilayer thin films; Nanocrystalline materials

Indexed keywords

COPPER; GRAIN SIZE AND SHAPE; IRON; MAGNETRON SPUTTERING; MULTILAYERS; NANOSTRUCTURED MATERIALS; RESIDUAL STRESSES;

MAGNETRON SPUTTERED; MULTILAYER THIN FILMS;

THIN FILMS;

EID: 33644849544     PISSN: 13596462     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.scriptamat.2006.02.008     Document Type: Article

References (27)

1. S.C. Tjong, and H. Chen Mater Sci Eng R 45 2004 1
2. K.S. Kumar, H. Van Swygenhoven, and S. Suresh Acta Mater 51 2003 5743
3. F. Martin, C. Jaouen, J. Pacaud, and G. Abadias Phys Rev B 71 2005 045422
4. M. Jaouen, J. Pacaud, and C. Jaouen Phys Rev B 64 2001 144106
5. A.C. Lewis, D. Josell, and T.P. Weihs Scripta Mater 48 2003 1079
6. X.W. Zhou, H.N.G. Wadley, R.A. Johnson, D.J. Larson, N. Tabat, and A. Cerezo Acta Mater 49 2001 4005
7. A. Misra, M. Verdier, Y.C. Lu, H. Kung, T.E. Mitchell, and M. Nastasi Scripta Mater 39 1998 555
8. N. Mara, A. Sergueeva, A. Misra, and A.K. Mukherjee Scripta Mater 50 2005 803
9. S. Labat, F. Bocquet, B. Gilles, and O. Thomas Scripta Mater 50 2004 717
10. D.W. Lee, D.H. Ryan, Z. Altounian, and A. Kuprin Phys Rev B 59 1999 7001
11. S.B. Qadri, C. Kim, K.H. Kim, P. Lubitz, and M.O. Twigg J Vac Sci Technol A 9 1991 430
12. V.M. Hauk, and E. Macherauch Adv X-ray Anal 27 1983 81
13. T.B. Massalski Binary alloy phase diagrams 2nd ed. 1990 ASM International Metals Park (OH) 1408
14. J.-T. Wang, L. Zhou, and Y. Kawazoe Phys Rev B 60 1999 3025 3028
15. Z.F. Li, W.S. Lai, and B.X. Liu Appl Phys Lett 77 2000 3920
16. Z.Q. Wang, S.H. Lu, Y.S. Li, F. Jona, and P.M. Marcus Phys Rev B 35 1987 9322
17. B. Heinrich, Z. Celinski, J.F. Cochran, W.B. Muir, J. Rudd, and Q.M. Zhong Phys Rev Lett 64 1990 673
18. Z. Tang, M. Hasegawa, Y. Nagai, and M. Saito Phys Rev B 65 2002 195108
19. Shamsutdinov NR, Böttger AJ, Delhez R, van der Pers NM, Tichelaar FD. Metall Mater Trans A, submitted for publication.
20. A. Van der Drift Philips Res Rep 22 1967 267
21. F.A. Doljack, and R.W. Hoffman Thin Solid Films 12 1972 71
22. C. Zener Phys Rev 60 1941 906
23. T. Karabacak, C.R. Picu, J.J. Senkevich, G.-C. Wang, and T.-M. Lu J Appl Phys 96 2004 5740
24. W.D. Nix, and B.M. Clemens J Mater Res 14 1999 3467
25. S.C. Seel, C.V. Thompson, S.J. Hearne, and J.A. Floro J Appl Phys 88 2000 7079
26. L.B. Freund, and S. Suresh Thin Film Materials Stress, defect formation and surface evolution 2003 Cambridge University Press Cambridge p.70
27. Shamsutdinov NR, Böttger AJ. Acta Mater submitted for publication.