Physical and structural properties of RF magnetron sputtered ZnO films

Integrated Ferroelectrics

Volumn 69, Issue , 2005, Pages 43-53

  Chang, Ren Chuan ^a   Chu, Sheng Vuan ^a   Lo, Kuang Yao ^b   Lo, Shih Chieh ^b   Huang, Yi Ren ^b  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b NATIONAL CHIAYI UNIVERSITY   (Taiwan)

Author keywords

r.f. Sputtering; Reflective second harmonic generation; Zno

Indexed keywords

CRYSTAL STRUCTURE; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; POLYCRYSTALLINE MATERIALS; SPECTROPHOTOMETERS; ZINC OXIDE;

OPTICAL TRANSMITTANCE MEASUREMENTS; R.F. SPUTTERING; REFLECTIVE SECOND HARMONIC GENERATION;

THIN FILMS;

EID: 33644765830     PISSN: 10584587     EISSN: 16078489     Source Type: Journal    
DOI: 10.1080/10584580590897254     Document Type: Conference Paper

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