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Volumn 5991, Issue , 2005, Pages

Thin-film design for multilayer diffraction gratings

Author keywords

CPA; Diffraction grating; Laser damage; Pulse compression; Thin film

Indexed keywords

CPA; LASER-DAMAGE THRESHOLD; PULSE COMPRESSION;

EID: 33644592197     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.638818     Document Type: Conference Paper
Times cited : (16)

References (11)
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    • edited by H. E. Bennett, A. H. Guenther, M. R. Kozlowski, B. E. Newnam, and M. J. Soileau, SPIE, Bellingham, WA
    • J. A. Britten, M. D. Perry, B. W. Shore, R. D. Boyd, G. E. Loomis, and R. Chow, "High-energy dielectric multilayer gratings optimized for manufacturability and laser damage threshold," in Laser-Induced Damage in Optical Materials: 1995, edited by H. E. Bennett, A. H. Guenther, M. R. Kozlowski, B. E. Newnam, and M. J. Soileau, Vol. 2714, pp. 511-520, SPIE, Bellingham, WA, 1996.
    • (1996) Laser-induced Damage in Optical Materials: 1995 , vol.2714 , pp. 511-520
    • Britten, J.A.1    Perry, M.D.2    Shore, B.W.3    Boyd, R.D.4    Loomis, G.E.5    Chow, R.6
  • 6
    • 0031169520 scopus 로고    scopus 로고
    • Antireflective coatings
    • C. A. Mack, "Antireflective coatings," Microlithogr. World 6(3), 29-30 (1997).
    • (1997) Microlithogr. World , vol.6 , Issue.3 , pp. 29-30
    • Mack, C.A.1
  • 7
    • 0023327971 scopus 로고
    • Positive photoresist enhancement options
    • P. Burggraaf, "Positive photoresist enhancement options," Semicond. Int. 10(5), 84-91 (1987).
    • (1987) Semicond. Int. , vol.10 , Issue.5 , pp. 84-91
    • Burggraaf, P.1
  • 8
    • 21244481004 scopus 로고    scopus 로고
    • Design and properties analysis of multi-layer dielectric used in pulse compressor gratings
    • W. Kong, Z. Shen, J. Shen, J. Shao, and Z. Fan, "Design and properties analysis of multi-layer dielectric used in pulse compressor gratings," Optik 116, 325-330 (2005).
    • (2005) Optik , vol.116 , pp. 325-330
    • Kong, W.1    Shen, Z.2    Shen, J.3    Shao, J.4    Fan, Z.5
  • 10
    • 85135903767 scopus 로고    scopus 로고
    • High precision coating technology for large aperture NIF optics
    • OSA Technical Digest, Optical Society of America, Washington, DC
    • J. B. Oliver, J. Howe, A. Rigatti, D. J. Smith, and C. Stolz, "High precision coating technology for large aperture NIF optics," in Optical Interference Coatings, OSA Technical Digest, p. ThD2, Optical Society of America, Washington, DC, 2001.
    • (2001) Optical Interference Coatings
    • Oliver, J.B.1    Howe, J.2    Rigatti, A.3    Smith, D.J.4    Stolz, C.5
  • 11
    • 0036574788 scopus 로고    scopus 로고
    • 2 single layers deposited by reactive evaporation, ion-assisted deposition and plasma ion-assisted deposition
    • 2 single layers deposited by reactive evaporation, ion-assisted deposition and plasma ion-assisted deposition," Thin Solid Films 410, 86-93 (2002).
    • (2002) Thin Solid Films , vol.410 , pp. 86-93
    • Thielsch, R.1    Gatto, A.2    Herber, J.3    Kaiser, N.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.