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Volumn 6, Issue 3, 1997, Pages 29-30
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Antireflective coatings
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Author keywords
[No Author keywords available]
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Indexed keywords
ANTIREFLECTION COATINGS;
ELECTRIC FIELDS;
GEOMETRICAL OPTICS;
INTEGRATED CIRCUIT MANUFACTURE;
LIGHT REFLECTION;
RESIST PROFILE;
SWING CURVE EFFECTS;
PHOTOLITHOGRAPHY;
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EID: 0031169520
PISSN: 1074407X
EISSN: None
Source Type: Trade Journal
DOI: None Document Type: Article |
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Times cited : (13)
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References (0)
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