Rapid direct micromachining of PTFE using MeV ions in an oxygen rich atmosphere

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 231, Issue 1-4, 2005, Pages 378-383

  Grime, G W ^a   Sofield, C J ^a   Gomez Morilla, I ^a   Gwilliam, R ^a   Ynsa, M D ^b   Enguita, O ^c  

^a UNIVERSITY OF SURREY   (United Kingdom)

^b CENTRO NACIONAL DE ACELERADORES   (Spain)

^c CENTRO DE MICROANÁLISIS DE MATERIALES   (Spain)

Author keywords

Fluoropolymers; Ion beam lithography; Micromachining; Radiation damage

Indexed keywords

ION BEAM LITHOGRAPHY; MICROMACHINING; POLYTETRAFLUOROETHYLENES; RADIATION DAMAGE; VACUUM;

GASEOUS COMPOUNDS; MEV PROTONS;

FLUORINE CONTAINING POLYMERS;

EID: 33644556505     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.01.086     Document Type: Conference Paper

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