Surface modification and adhesion improvement of PTFE film by ion beam irradiation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 219-220, Issue 1-4, 2004, Pages 963-967

  Lee, S W ^a   Hong, J W ^a   Wye, M Y ^a   Kim, J H ^a   Kang, H J ^a   Lee, Y S ^b  

^a Chungbuk National University   (South Korea)

^b Hanbat National University   (South Korea)

Author keywords

Ion surface impact; PTFE; XPS

Indexed keywords

ADHESION; ATOMIC FORCE MICROSCOPY; ELECTRONICS PACKAGING; ION BEAMS; MICROELECTRONICS; OXYGEN; POLYTETRAFLUOROETHYLENES; SCANNING ELECTRON MICROSCOPY; SURFACE ROUGHNESS; SURFACE TREATMENT; X RAY PHOTOELECTRON SPECTROSCOPY;

ION SURFACE IMPACT; MICROELECTRONICS PACKAGING INDUSTRY; PLASMA TREATMENTS;

PLASTIC FILMS;

EID: 2342488038     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2004.01.197     Document Type: Conference Paper

References (10)

1. Hintzer K., Lour G. Scheirs J. Modern Fluoropolymers: High Performance for Diverse Applications. 1997;2 Wiley, Chichester.
2. Gangal S.V. Polytetrafluoroethylene Homopolymer of Tetrafluoroethylene. Encyclopedia of Polymer Science and Engine. 1989;Wiley, New York. p. 577.
3. Brewis D.M. J. Adhes. Sci. Technol. 37:1992;97.
4. Rye R.R. J. Polym. Sci. Part B: Polym. Phys. 26:1998;2133.
5. Duraud J.P., Moel A.L. Nucl. Instr. and Meth. B. 105:1996;71.
6. Ingemarsson P.A., Keane M.P., Gelius U. J. Appl. Phys. 66:1989;3548.
7. Cho J.S., Choi W.K., Koh S.K., Yoon K.H. J. Vac. Sci. Technol. B. 16(3):1998;1110.
8. Koh S.K., Seok J.W., Choi S.C., Choi W.K., Jung H.J. J. Mater. Res. 13:1998;1363.
9. Inagaki N., Tasaka S., Park Y.W. J. Adhes. Sci. Technol. 12:1998;1105.
10. Moulder J.F., Stickle W.F., Sobol P.E., Bomben K.D. Handbook of X-ray Photoelectron Spectroscopy. 1995;Physical Electronics, Inc. USA.