Epitaxial growth of non-cubic silicon

Microelectronics Journal

Volumn 36, Issue 3-6, 2005, Pages 506-509

  Fissel, A ^a   Wang, C ^a   Bugiel, E ^a   Osten, H J ^a  

^a LEIBNIZ UNIVERSITY HANNOVER   (Germany)

Author keywords

Molecular beam epitaxy; Silicon; Superlattice; Twinning

Indexed keywords

EPITAXIAL GROWTH; HETEROJUNCTIONS; MOLECULAR BEAM EPITAXY; NUCLEATION; SUPERLATTICES; TWINNING;

SI SUBSTRATES; TWIN BOUNDARIES;

SILICA;

EID: 33644544080     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2005.02.064     Document Type: Conference Paper

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