Twinned epitaxial layers formed on Si(111)√3×√3-B

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 3, 1998, Pages 1934-1937

  Hibino, H ^a   Sumitomo, K ^a   Ogino, T ^a  

^a Kashino Diverse Brain Research Laboratory of NTT Communication Science Laboratories   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BI-LAYER; DOMAIN BOUNDARY; EPITAXIAL SI; GROWTH PROCESS; GROWTH STAGES; ISLAND NUCLEATION; POLYTYPES; POST-GROWTH ANNEAL; SI (1 1 1); THERMAL STABILITY;

SILICON;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 0001416754     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581199     Document Type: Article

References (15)

1. M. Murayama and T. Nakayama, J. Phys. Soc. Jpn. 61, 2419 (1992).
2. M. Murayama and T. Nakayama, Jpn. J. Appl. Phys., Part 1 32, 743 (1993).
3. M. Murayama and T. Nakayama, Phys. Rev. B 49, 4710 (1994).
4. S. Mardix, Phys. Rev. B 33, 8677 (1986).
5. R. L. Headrick, B. E. Weir, J. Bevk, B. S. Freer, D. J. Eaglesham, and L. C. Feldman, Phys. Rev. Lett. 65, 1128 (1990).
6. For example, Y. Homma, R. J. McClelland, and H. Hibino, Jpn. J. Appl. Phys., Part 2 29, L2254 (1990).
7. E. de Frésart, K. L. Wang, and S. S. Rhee, Appl. Phys. Lett. 53, 48 (1988).
8. T. P. Roge, F. Thibaudau, Ph. Mathiez, Ph. Dumas, and F. Salvan, J. Vac. Sci. Technol. B 12, 2040 (1994).
9. D. E. Jones, J. P. Pelz, Y. Hong, E. Bauer, and I. S. T. Tsong Phys. Rev. Lett. 77, 330 (1996).
10. R. L. Headrick, I. K. Robinson, E. Vlieg, and L. C. Feldman, Phys. Rev. Lett. 63, 1253 (1989);
11. P. Bedrossian, R. D. Meade, K. Mortensen, D. M. Chen, J. A. Golovchenko, and D. Vanderbilt, ibid., Phys. Rev. Lett. 63, 1257 (1989);
12. L-W. Lyo, E. Kaxiras, and Ph. Avouris, ibid., Phys. Rev. Lett. 63, 1261 (1989).
13. H. Hibino and T. Ogino, Surf. Sci. (to be published).
14. H. Hibino, K. Sumitomo, and T. Ogino, Appl. Surf. Sci. (in press).
15. Y. Kumagai, R. Mori, K. Ishimoto, K.-H. Park, and F. Hasegawa, Jpn. J. Appl. Phys., Part 1 34, 4593 (1995).