SCOPUS 정보 검색 플랫폼

Materials Science and Engineering B

Volumn 42, Issue 1-3, 1996, Pages 235-239

EBIC study on the electrical activity of stacking faults in silicon

(4) Sekiguchi, T c Shen, B a,c Watanabe, T c Sumino, K b,c

a NANJING UNIVERSITY (China)

b NIPPON STEEL CORPORATION (Japan)

c TOHOKU UNIVERSITY (Japan)

Author keywords

Cz Si; EBIC contrast; Electron beam induced current; Stacking faults

Indexed keywords

CHARGE CARRIERS; CRYSTAL GROWTH FROM MELT; ELECTRIC PROPERTIES; ELECTRON BEAMS; INDUCED CURRENTS; OXYGEN; PRECIPITATION (CHEMICAL); STACKING FAULTS; THERMAL EFFECTS;

ELECTRON BEAM INDUCED CURRENT (EBIC) TECHNIQUE; FRANK PARTIAL DISLOCATIONS;

SEMICONDUCTING SILICON;

EID: 0041353476 PISSN: 09215107 EISSN: None Source Type: Journal
DOI: 10.1016/S0921-5107(96)01713-8 Document Type: Article

Times cited : (15)

References (13)

1
- 4243904220
- M. Seibt, Solid State Phenom., 19-20 (1990) 45.
- (1990) Solid State Phenom. , vol.19-20 , pp. 45
- Seibt, M.¹

2
- 0025388095
- M.D. De Coteau, P.R. Wilshaw and R. Falster, Phys. Stat. Sol., A117 (1990) 403.
- (1990) Phys. Stat. Sol. , vol.A117 , pp. 403
- De Coteau, M.D.¹ Wilshaw, P.R.² Falster, R.³

3
- 0001073162
- J. Kaniewski, M. Kaniewska and A.R. Peaker, Appl. Phys. Lett., 60 (1992) 359.
- (1992) Appl. Phys. Lett. , vol.60 , pp. 359
- Kaniewski, J.¹ Kaniewska, M.² Peaker, A.R.³

4
- 0001069530
- B. Shen, T. Sekiguchi, J. Jablonski and K. Sumino, J. Appl. Phys., 76 (1994) 4540.
- (1994) J. Appl. Phys. , vol.76 , pp. 4540
- Shen, B.¹ Sekiguchi, T.² Jablonski, J.³ Sumino, K.⁴

5
- 0004444730
- L.C. Kimerling, H.J. Leamy and J.R. Patel, Appl. Phys. Lett., 30 (1977) 217.
- (1977) Appl. Phys. Lett. , vol.30 , pp. 217
- Kimerling, L.C.¹ Leamy, H.J.² Patel, J.R.³

6
- 0024657193
- A. Castaldini, A. Cavallini, A. Poggi and E. Susi, Appl. Phys. A, 48 (1989) 431.
- (1989) Appl. Phys. A , vol.48 , pp. 431
- Castaldini, A.¹ Cavallini, A.² Poggi, A.³ Susi, E.⁴

7
- 0006295827
- H.R. Huff, W. Bergholz and K. Sumino (eds.)
- T. Sekiguchi, S. Kusanagi, B. Shen and K. Sumino, in H.R. Huff, W. Bergholz and K. Sumino (eds.), Semiconductor Silicon, 1994, p. 659.
- (1994) Semiconductor Silicon , pp. 659
- Sekiguchi, T.¹ Kusanagi, S.² Shen, B.³ Sumino, K.⁴

8
- 0019633047
- S. Marklund, Phys. Stat. Sol. (b), 108 (1981) 97.
- (1981) Phys. Stat. Sol. (B) , vol.108 , pp. 97
- Marklund, S.¹

9
- 4243948280
- L.F. Mattheis and J.R. Patel, Phys. Rev., B23 (1981) 538.
- (1981) Phys. Rev. , vol.B23 , pp. 538
- Mattheis, L.F.¹ Patel, J.R.²

10
- 0000313751
- T. Sekiguchi and K. Sumino, Rev. Sci. Instrum., 66 (1995) 4277.
- (1995) Rev. Sci. Instrum. , vol.66 , pp. 4277
- Sekiguchi, T.¹ Sumino, K.²

11
- 0344179895
- Z.J. Radzimski, T.Q. Zhou, A. Buczkowski, G.A. Rozgonyi, D. Flinn, L.G. Helling and J.A. Ross, Appl. Phys. Lett., 60 (1992) 1096.
- (1992) Appl. Phys. Lett. , vol.60 , pp. 1096
- Radzimski, Z.J.¹ Zhou, T.Q.² Buczkowski, A.³ Rozgonyi, G.A.⁴ Flinn, D.⁵ Helling, L.G.⁶ Ross, J.A.⁷

12
- 0000909291
- S. Kusanagi, T. Sekiguchi, B. Shen and K. Sumino, Mater. Sci. Technol. 11 (1995) 685.
- (1995) Mater. Sci. Technol. , vol.11 , pp. 685
- Kusanagi, S.¹ Sekiguchi, T.² Shen, B.³ Sumino, K.⁴

13
- 0003598030
- Butterworths, London
- P.B. Hirsh, A. Howie, R.B. Nicholson, D.W. Pashley and M.J. Whelan, Electron Microscopy of Thin Crystals, Butterworths, London, 1965, p. 222.
- (1965) Electron Microscopy of Thin Crystals , pp. 222
- Hirsh, P.B.¹ Howie, A.² Nicholson, R.B.³ Pashley, D.W.⁴ Whelan, M.J.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.