Indentation size effect on hardness of nanostructured thin films

Key Engineering Materials

Volumn 312, Issue , 2006, Pages 363-368

  Lu, Chunsheng ^a   Mai, Yiu Wing ^a   Shen, Yao Gen ^b  

^a UNIVERSITY OF SYDNEY   (Australia)

^b CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

AlN; Hardness; Nanoindentation; Size effect; Thin films; Ti Al N

Indexed keywords

ALUMINUM NITRIDE; GRAIN BOUNDARIES; HARDNESS; INDENTATION; NANOSTRUCTURED MATERIALS; PLASTIC DEFORMATION;

ALN; INDENTATION DEPTH; NANOINDENTATION; SIZE EFFECT; TI-AL-N;

THIN FILMS;

EID: 33644539757     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: 10.4028/0-87849-994-6.363     Document Type: Article

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