Large mask area effects in selective area growth

Journal of Crystal Growth

Volumn 289, Issue 1, 2006, Pages 24-30

  Olsson, Fredrik ^a   Zhu, Tiankai ^a   Mion, Gaël ^a   Lourdudoss, Sebastian ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY KTH   (Sweden)

Author keywords

A3. Metalorganic vapor phase epitaxy; A3. Selective epitaxy; B1. Gallium arsenide

Indexed keywords

DIFFUSION; EPITAXIAL GROWTH; FILLING; MATHEMATICAL MODELS; METALLORGANIC VAPOR PHASE EPITAXY;

GALLIUM ARSENIDE; GROWTH RENDERING SPECIES; SELECTIVE EPITAXY; TWO-DIMENSIONAL FILLING;

SEMICONDUCTING GALLIUM ARSENIDE;

EID: 33244497117     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2005.10.130     Document Type: Article

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