Visible and infrared wave-front metrology by Quadri-Wave Lateral Shearing Interferometry

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5965, Issue , 2005, Pages

  Velghe, S ^a   Primot, J ^a   Guerineau N ^a   Cohen, M ^b   Wattellier, B ^b  

^a ONERA   (France)

^b PHASICS SA   (France)

Author keywords

Infrared; Lateral shearing interferometry; Metrology; Phase measurement; Shack Hartmann

Indexed keywords

ADAPTIVE OPTICS; INFRARED RADIATION; INTERFEROMETERS; OPTICAL DEVICES; OPTICAL PHASE CONJUGATION; SHEARING;

LATERAL SHEARING INTERFEROMETRY; QUADRI-WAVE LATERAL SHEARING INTERFEROMETER (QWLSI); SHACK-HARTMANN; WAVE-FRONT ANALYSIS;

INTERFEROMETRY;

EID: 33244483043     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.626248     Document Type: Conference Paper

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