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Volumn 7 A, Issue , 2005, Pages 89-99

Design of parallel kinematic XY mechanisms

Author keywords

[No Author keywords available]

Indexed keywords

CONSTRAINT ARRANGEMENT; FLEXURE MECHANISM; NONLINEAR ANALYSES; PARALLELOGRAM FLEXURE;

EID: 33244462824     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (23)

References (21)
  • 1
    • 0031176660 scopus 로고    scopus 로고
    • Optimal design of a flexure hinge based X-Y-θ wafer stage
    • Ryu, J.W., Gweon, D.-G, and Moon, K.S., 1997, "Optimal Design of a Flexure Hinge based X-Y-θ Wafer Stage", Journal of Precision Engineering, 21(1), pp. 18-28.
    • (1997) Journal of Precision Engineering , vol.21 , Issue.1 , pp. 18-28
    • Ryu, J.W.1    Gweon, D.-G.2    Moon, K.S.3
  • 2
    • 0028526039 scopus 로고
    • A new high resolution two-dimensional micropositioning device for scanning probe microscopy
    • Smith, A.R, Gwo, S., and Shih, C.K. 1994, "A New High Resolution Two-dimensional Micropositioning Device for Scanning Probe Microscopy", Review of Scientific Instruments, 64 (10), pp. 3216-3219.
    • (1994) Review of Scientific Instruments , vol.64 , Issue.10 , pp. 3216-3219
    • Smith, A.R.1    Gwo, S.2    Shih, C.K.3
  • 3
    • 33244492917 scopus 로고    scopus 로고
    • Long range stage for the metrological atomic force microscope
    • Eom, T.B. and Kim, J.Y., 2001, "Long Range Stage for the Metrological Atomic Force Microscope", Proc. of ASPE 2001 Annual Meeting, pp. 156-159.
    • (2001) Proc. of ASPE 2001 Annual Meeting , pp. 156-159
    • Eom, T.B.1    Kim, J.Y.2
  • 5
    • 0033704649 scopus 로고    scopus 로고
    • The Millipede - More than one thousand tips for future AFM data storage
    • Vettiger, P., et al., 2000, "The Millipede - More than one thousand tips for future AFM data storage", IBM Journal of Research and Development, 44 (3), pp. 323-340.
    • (2000) IBM Journal of Research and Development , vol.44 , Issue.3 , pp. 323-340
    • Vettiger, P.1
  • 15
    • 84858546630 scopus 로고    scopus 로고
    • "Apparatus Having motion with Pre-determined degree of Freedom", US Patent 6, 688, 183 B2
    • Awtar S., and Slocum A.H., 2004, "Apparatus Having motion with Pre-determined degree of Freedom", US Patent 6, 688, 183 B2.
    • (2004)
    • Awtar, S.1    Slocum, A.H.2
  • 18
    • 51249194120 scopus 로고
    • Etude des deformations d'une lame de suspension elastique
    • Plainevaux, J.E., 1956, "Etude des deformations d'une lame de suspension elastique", Nuovo Cimento, 4, pp. 922-928.
    • (1956) Nuovo Cimento , vol.4 , pp. 922-928
    • Plainevaux, J.E.1
  • 20
    • 33244462823 scopus 로고    scopus 로고
    • Closed-form nonlinear analysis of beam-based flexure modules
    • DETC2005-85440, Long Beach, CA
    • Awtar S., and Slocum A.H., 2005, "Closed-form Nonlinear Analysis of Beam-based Flexure Modules", DETC2005-85440, Proc. ASME IDETC/CIE 2005, Long Beach, CA.
    • (2005) Proc. ASME IDETC/CIE 2005
    • Awtar, S.1    Slocum, A.H.2
  • 21
    • 17044447494 scopus 로고
    • A new design for suspension of linear microactuators
    • Saggere, L., Kota, S., 1994, "A New Design for Suspension of Linear Microactuators", ASME Journal of Dynamic Systems and Control, 55 (2), pp. 671-675.
    • (1994) ASME Journal of Dynamic Systems and Control , vol.55 , Issue.2 , pp. 671-675
    • Saggere, L.1    Kota, S.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.